JPH02145240U - - Google Patents

Info

Publication number
JPH02145240U
JPH02145240U JP5540289U JP5540289U JPH02145240U JP H02145240 U JPH02145240 U JP H02145240U JP 5540289 U JP5540289 U JP 5540289U JP 5540289 U JP5540289 U JP 5540289U JP H02145240 U JPH02145240 U JP H02145240U
Authority
JP
Japan
Prior art keywords
jig
fork support
fork
main body
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5540289U
Other languages
English (en)
Japanese (ja)
Other versions
JPH085160Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989055402U priority Critical patent/JPH085160Y2/ja
Publication of JPH02145240U publication Critical patent/JPH02145240U/ja
Application granted granted Critical
Publication of JPH085160Y2 publication Critical patent/JPH085160Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Liquid Crystal (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP1989055402U 1989-05-15 1989-05-15 基板移し替え治具 Expired - Lifetime JPH085160Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989055402U JPH085160Y2 (ja) 1989-05-15 1989-05-15 基板移し替え治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989055402U JPH085160Y2 (ja) 1989-05-15 1989-05-15 基板移し替え治具

Publications (2)

Publication Number Publication Date
JPH02145240U true JPH02145240U (en]) 1990-12-10
JPH085160Y2 JPH085160Y2 (ja) 1996-02-14

Family

ID=31578320

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989055402U Expired - Lifetime JPH085160Y2 (ja) 1989-05-15 1989-05-15 基板移し替え治具

Country Status (1)

Country Link
JP (1) JPH085160Y2 (en])

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61291335A (ja) * 1985-06-19 1986-12-22 Denkoo:Kk 半導体移換え装置
JPS6265843A (ja) * 1985-09-12 1987-03-25 Denkoo:Kk 半導体ウエハ取出し装置
JPS63102236U (en]) * 1986-12-23 1988-07-02

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61291335A (ja) * 1985-06-19 1986-12-22 Denkoo:Kk 半導体移換え装置
JPS6265843A (ja) * 1985-09-12 1987-03-25 Denkoo:Kk 半導体ウエハ取出し装置
JPS63102236U (en]) * 1986-12-23 1988-07-02

Also Published As

Publication number Publication date
JPH085160Y2 (ja) 1996-02-14

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